Showing results 1 to 1 of 1
The Effect of Composition and Annealing Environment on Formation of Nanocrystal Si Memory using ECR-PECVD-Deposited Silicon-Rich Silicon Oxide Cha, Daigil; Shin, JungHoon; Jeong, Soo-Hwan; Cha, Young Kwan; Yoo, In K., Materials Research Society Fall, 2004 |
Discover