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Simultaneous achievement of high-quality oxide passivation of nc-Si and suppression of Er de-activation by silicon-rich silicon oxide/Er-doped silicon nitride multilayers Kim, I.Y.; Shin, JungHoon; Kim, K.J.; Yang, M.-S.; Park, Y., 2008 5th International Conference on Group IV Photonics, GFP, pp.52 - 54, 2008-09-17 |
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