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Composition dependence of room temperature 1.54 mu m Er3+ luminescence from erbium-doped silicon : oxygen thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition Shin, JungHoon; Kim, MJ; Seo, SY; Lee, C, APPLIED PHYSICS LETTERS, v.72, no.9, pp.1092 - 1094, 1998-03 |
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