Continuum model of RF glow dischargeRF 글로우 방전의 연속체 모델
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | Choi, Duk-In | - |
| dc.contributor.advisor | 최덕인 | - |
| dc.contributor.author | Choi, Nak-Heon | - |
| dc.contributor.author | 최낙헌 | - |
| dc.date.accessioned | 2011-12-14T07:50:47Z | - |
| dc.date.available | 2011-12-14T07:50:47Z | - |
| dc.date.issued | 1989 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=66636&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/48217 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 물리학과, 1989.2, [ ii, 38 p. ] | - |
| dc.description.abstract | By a macroscopic fluid description the numerical model of RF glow discharge is constructed. The model is based on a self-consistent solution of the continuity equations for electron, positive ion and negative on coupled with Poisson``s equation. With the model the physical properties of the discharge is described and discussed. And the effects of the negative ion formation is analyzed using two different gases. The influence of some discharge parameter is also presented. | eng |
| dc.language | eng | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | Continuum model of RF glow discharge | - |
| dc.title.alternative | RF 글로우 방전의 연속체 모델 | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 66636/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000871433 | - |
| dc.contributor.localauthor | Choi, Nak-Heon | - |
| dc.contributor.localauthor | 최낙헌 | - |
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