Continuum model of RF glow discharge

Abstract

By a macroscopic fluid description the numerical model of RF glow discharge is constructed. The model is based on a self-consistent solution of the continuity equations for electron, positive ion and negative on coupled with Poisson``s equation. With the model the physical properties of the discharge is described and discussed. And the effects of the negative ion formation is analyzed using two different gases. The influence of some discharge parameter is also presented.