Visible iuminescence from SiN-based thin films and its applications = 실리콘 나이트 라이드를 기반으로 한 박막의 가시광선 영역의 발광과 그 응용

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We investigate visible photoluminescence and applications of amorphous $Tb^{3+}$ doped silicon oxynitride deposited by plasma enhanced chemical vapor deposition (PECVD) in inductively coupled plasma (ICP) system. The films show broad luminescence due to band-tail states. After Tb doping into the films, we observed strong green luminescence from $Tb^{3+}$ intra-4f transitions superimposed on the background luminescence peak from oxynitride. However, there’s no correlation between them as the composition and the annealing conditions were varied. Photoluminescence excitation spectroscopy shows a strong increase in the $Tb^{3+}$ luminescence intensity as the pump energy is increased above 3.5 eV while the host matrix luminescence decreases. Taken together, the results suggest that there is little energy transfer between band-tail states of silicon oxynitride host matrix and $Tb^{3+}$, and that efficient excitation of $Tb^{3+}$ by carriers requires excitation of carriers into the extended, rare-earth related states in silicon oxynitride. As an application, we investigate using self-luminescent whispering gallery mode (WGM) microdisk of $Tb^{3+}$ doped silicon oxynitride for biosensor application. ‘Self-luminescent microdisk’means that WGM of microdisk can be excited by luminescence from the active material itself by vertical and broadband pumping without any coupling setup such as waveguide or tapered fiber coupling, that can induce some difficulties and complexities. Using FDTD (Finite-Difference Time-Domain) simulation method we evaluated theoretical value of Q factor and sensor functionality, such as Sensitivity and detection limit, of the proposed microdisk. Based on the simulation results, we fabricated 7, 10, and 12 μm diameter microdisks with thickness of ~120 nm using E-beam lithography and dry/wet etching processes. We measured WGMs of the fabricated microdisks and obtained Q factors of 400~900. Finally, the bio-sensing capabilities of the microdisks wer...
Shin, Jung-hoonresearcher신중훈researcher
한국과학기술원 : 물리학과,
Issue Date
309031/325007  / 020037608

학위논문(박사) - 한국과학기술원 : 물리학과, 2009.2, [ ix, 93 p. ]


Silicon nitride; photoluminescence; visible; biosensor; 실리콘 나이트라이드; 발광; 가시광선; 바이오센서

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