헬리콘파 플라즈마 발생 및 특성 연구Study of helicon wave plasma production and its characteristics
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 장홍영 | - |
| dc.contributor.advisor | Chang, Hong-Young | - |
| dc.contributor.author | 김정형 | - |
| dc.contributor.author | Kim, Jung-Hyung | - |
| dc.date.accessioned | 2011-12-14T07:27:01Z | - |
| dc.date.available | 2011-12-14T07:27:01Z | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=108886&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/47542 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 물리학과, 1996.8, [ ix, 117 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | High density plasmas | - |
| dc.subject | SiOF film | - |
| dc.subject | Helicon waves | - |
| dc.subject | SiOF 박막 | - |
| dc.subject | 헬리콘파 | - |
| dc.subject | 고밀도 플라즈마 | - |
| dc.title | 헬리콘파 플라즈마 발생 및 특성 연구 | - |
| dc.title.alternative | Study of helicon wave plasma production and its characteristics | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 108886/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000925078 | - |
| dc.contributor.localauthor | 김정형 | - |
| dc.contributor.localauthor | Kim, Jung-Hyung | - |
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