고분해능을 갖는 연 X-선 lithography용 비구면 4-반사 광학계의 설계 및 평가Optical design and evaluation of the aspherized 4 mirror optical system for high resolution for soft X-ray projection lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 공홍진 | - |
| dc.contributor.advisor | Kong, Hong-Jin | - |
| dc.contributor.author | 임천석 | - |
| dc.contributor.author | Rim, Cheon-Seog | - |
| dc.date.accessioned | 2011-12-14T07:26:54Z | - |
| dc.date.available | 2011-12-14T07:26:54Z | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106644&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/47535 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 물리학과, 1996.2, [ v, 120 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Mirror system | - |
| dc.subject | Optical design | - |
| dc.subject | Soft x-ray projection lithography | - |
| dc.subject | Diffraction limited performance | - |
| dc.subject | Third order aberration | - |
| dc.title | 고분해능을 갖는 연 X-선 lithography용 비구면 4-반사 광학계의 설계 및 평가 | - |
| dc.title.alternative | Optical design and evaluation of the aspherized 4 mirror optical system for high resolution for soft X-ray projection lithography | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 106644/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000935301 | - |
| dc.contributor.localauthor | 임천석 | - |
| dc.contributor.localauthor | Rim, Cheon-Seog | - |
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