Theoretical investigations for electron heating and plasma transport phenomena in ECR- and TCP- discharge = ECR 및 TCP 방전에서의 전자가열과 플라즈마 수송현상에 대한 이론적인 연구

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A one-dimensional fluid model of the microwave electron cyclotron resonance (ECR) discharge, which includes the inhomogeneity effects of the external magnetic field, is developed. The plasma and sheath are modelled seperately, and appropriate plasma-sheath boundary conditions are utilized. Microwave is represented by an energy flow, and treated by a ray tracing technique. An analytic solution, which is valid for general collision frequencies and device lengths, has been obtained for plasma heating in a planar-type inductively coupled plasma (TCP) discharge. The analytic solution agrees with a particle simulation result based on the particle in cell method, and it indicates the existence of an optimum discharge condition.
Advisors
Choi, Duk-In최덕인
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
1996
Identifier
105332/325007 / 000925227
Language
eng
Description

학위논문(박사) - 한국과학기술원 : 물리학과, 1996.2, [ vii, 98 p. ]

Keywords

Transport; Heating; ECR; 플라즈마 수송; 전자가열; TCP

URI
http://hdl.handle.net/10203/47529
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=105332&flag=dissertation
Appears in Collection
PH-Theses_Ph.D.(박사논문)
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