학위논문(박사) - 한국과학기술원 : 물리학과, 1995.8, [ ix, 80 p. ]
플라즈마 변수 평준화; 광분석; 활성원자; 전자싸이클로트론 공명 플라즈마; ECR; actinometry; Optical emission spectroscopy; Plasma parameter normalization; Radical species
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