극자외선 마이크로 리소그라피를 위한 4-반사경 광학계의 수차해석Aberration analysis of 4-mirror optical system for deep UV micro-lithoreaphy
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 공홍진 | - |
| dc.contributor.advisor | 이상수 | - |
| dc.contributor.advisor | Kong, Hong-Jin | - |
| dc.contributor.advisor | Lee, Sang-Soo | - |
| dc.contributor.author | 김종태 | - |
| dc.contributor.author | Kim, Jong-Tae | - |
| dc.date.accessioned | 2011-12-14T07:25:39Z | - |
| dc.date.available | 2011-12-14T07:25:39Z | - |
| dc.date.issued | 1993 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=60658&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/47453 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 물리학과, 1993.2, [ iv, 73 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 극자외선 마이크로 리소그라피를 위한 4-반사경 광학계의 수차해석 | - |
| dc.title.alternative | Aberration analysis of 4-mirror optical system for deep UV micro-lithoreaphy | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 60658/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000865094 | - |
| dc.contributor.localauthor | 김종태 | - |
| dc.contributor.localauthor | Kim, Jong-Tae | - |
- Appears in Collection
- PH-Theses_Ph.D.(박사논문)
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