DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Choe, Won-Ho | - |
dc.contributor.advisor | 최원호 | - |
dc.contributor.author | Chai, Kil-Byoung | - |
dc.contributor.author | 채길병 | - |
dc.date.accessioned | 2011-12-14T07:25:36Z | - |
dc.date.available | 2011-12-14T07:25:36Z | - |
dc.date.issued | 2011 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=466332&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/47449 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 물리학과, 2011.2, [ x, 117 p. ] | - |
dc.description.abstract | It is required to control the nano-particle generation, growth, and crystallinity in various plasma applications. In order to achieve this, it is essential to understand the interaction between nano-particles and plasma species which can be accomplished by the accurate measurement of both plasma and nano-particle parameters. However, despite the development of many nano-particle diagnostics, not many plasma diagnostics have been developed for dusty plasmas because of the presence of the nano-particle, negative ions, and reactive species. In this dissertation, therefore, by utilizing a floating probe and plasma emission spectroscopy which are less affected by reactive species, the interaction between nano-particles and plasma species was investigated and a study for controlling nano-particle generation, growth rate, and crystallinity was undertaken. The nano-particle growth pattern, spatial distribution, and morphology as well as plasma parameters were investigated in relatively low (capacitively-coupled plasma: $10^{9}-10^{10}cm^{-3}$) and relatively high (inductively-coupled plasma: $10^{10}-10^{11}cm^{-3}$) density plasmas. It is found that the plasma parameters are significantly changed with time, i.e., with nano-particle growth in low density plasmas while they are almost constant in high density plasmas. In addition, the nano-particle transport from the bulk plasma to the edge plasma occurs in high density plasmas and shapes of the produced nano-particles are different between low and high density plasmas. These results indicate that the nano-particles alter the plasma parameters by capturing electrons and ions while the high ion density causes the nano-particle transport toward the chamber wall and crystallization. A simple zero-dimensional fluid model was developed to quantitatively understand the interaction between nano-particles and plasma species and the calculated values are in good agreement with the measured values. Using the knowledge obtained re... | eng |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | control of nanoparticle crystallinity | - |
dc.subject | control of nanoparticle generation | - |
dc.subject | plasma-nanoparticle interaction | - |
dc.subject | dusty plasma physics | - |
dc.subject | plasma and nanoparticle diagnostics | - |
dc.subject | 플라즈마와 나노입자 진단 | - |
dc.subject | 나노입자 결정성 제어 | - |
dc.subject | 나노입자 생성량 제어 | - |
dc.subject | 플라즈마와 나노입자간 상호작용 | - |
dc.subject | 더스티 플라즈마 물리 | - |
dc.title | Control of nano-particle generation, growth rate and crystallinity by changing external parameters in $SiH_{4}$ plasmas | - |
dc.title.alternative | $SiH_{4}$ 플라즈마를 이용한 실리콘 계열 나노입자의 합성과 플라즈마 외부변수 조절을 통한 나노입자의 생성량, 성장속도 및 결정성 제어 | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 466332/325007 | - |
dc.description.department | 한국과학기술원 : 물리학과, | - |
dc.identifier.uid | 020057593 | - |
dc.contributor.localauthor | Chai, Kil-Byoung | - |
dc.contributor.localauthor | 채길병 | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.