학위논문(박사) - 한국과학기술원 : 물리학과, 2010.08, [ xi, 118 p. ]
공정 모니터링; 렌즈 광학진단계; 여기온도; 토모그래피; 전자온도; electron temperature; process monitoring; lens optical diagnostics; excitation temperature; tomography
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.