학위논문(박사) - 한국과학기술원 : 물리학과, 2005.2, [ vi, 98 p. ]
plasma parameter; high frequency icp; inductively coupled plasma; plasma source; 플라즈마변수제어; 고주파 방전; 유도결합플라즈마; 플라즈마원; 병렬공명안테나; PRA
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