학위논문(박사) - 한국과학기술원 : 물리학과, 2000.2, [ vii, 76 p. ]
Mixed-phase; Growth mechanism; Columnar growth; 저압화학증착법; 다결정실리콘; 혼합상; 성장 기작; 주상 성장; LPCVD; Polysilicon
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