학위논문(석사) - 한국과학기술원 : 기계공학전공, 2008.2, [ vii, 53 p. ]
thin-film measurement; thickness profile measurement; refractive index measurement; reflectometry; white-light interferometry; 박막 측정; 두께 형상 측정; 굴절률 측정; 반사광측정법; 백색광간섭법; thin-film measurement; thickness profile measurement; refractive index measurement; reflectometry; white-light interferometry; 박막 측정; 두께 형상 측정; 굴절률 측정; 반사광측정법; 백색광간섭법
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