판스프링과 보이스코일모터를 이용한 초정밀 XY 스테이지의 설계 및 특성분석 = The design and test of ultraprecision xy stage using leaf spring mechanism and voice-coil motor

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Advisors
권대갑researcherGweon, Dae-Gabresearcher
Description
한국과학기술원 : 기계공학전공,
Publisher
한국과학기술원
Issue Date
2003
Identifier
180131/325007 / 020013002
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2003.2, [ viii, 92 p. ]

Keywords

스테이지; 초정밀; 보이스코일모터; 판스프링; 나노기술; nanotechnology; stage; precision; voice-coil motor; leaf spring

URI
http://hdl.handle.net/10203/45438
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=180131&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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