판스프링과 보이스코일모터를 이용한 초정밀 XY 스테이지의 설계 및 특성분석The design and test of ultraprecision xy stage using leaf spring mechanism and voice-coil motor
- Advisors
- 권대갑researcher; Gweon, Dae-Gabresearcher
- Description
- 한국과학기술원 : 기계공학전공,
- Publisher
- 한국과학기술원
- Issue Date
- 2003
- Identifier
- 180131/325007 / 020013002
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학전공, 2003.2, [ viii, 92 p. ]
- Keywords
스테이지; 초정밀; 보이스코일모터; 판스프링; 나노기술; nanotechnology; stage; precision; voice-coil motor; leaf spring
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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