VCM을 이용한 wafer용 xyθ 미세구동기의 설계와 제어The design and control of xyθ fine stage using VCM for wafer stage
- Advisors
- 권대갑researcher; Gweon, Dae-Gabresearcher
- Description
- 한국과학기술원 : 기계공학전공,
- Publisher
- 한국과학기술원
- Issue Date
- 2002
- Identifier
- 173877/325007 / 020003061
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학전공, 2002.2, [ vii, 76 p. ]
- Keywords
최적설계; 개념설계; 미세구동기; VCM; 제어; control; optimal design; conceptual design; fine stage; VCM(Voice Coil Motor)
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.