VCM을 이용한 wafer용 xyθ 미세구동기의 설계와 제어 = The design and control of xyθ fine stage using VCM for wafer stage

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dc.contributor.advisor권대갑-
dc.contributor.advisorGweon, Dae-Gab-
dc.contributor.author김동민-
dc.contributor.authorKim, Dong-Min-
dc.date.accessioned2011-12-14T06:38:19Z-
dc.date.available2011-12-14T06:38:19Z-
dc.date.issued2002-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=173877&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/45302-
dc.description학위논문(석사) - 한국과학기술원 : 기계공학전공, 2002.2, [ vii, 76 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject최적설계-
dc.subject개념설계-
dc.subject미세구동기-
dc.subjectVCM-
dc.subject제어-
dc.subjectcontrol-
dc.subjectoptimal design-
dc.subjectconceptual design-
dc.subjectfine stage-
dc.subjectVCM(Voice Coil Motor)-
dc.titleVCM을 이용한 wafer용 xyθ 미세구동기의 설계와 제어 = The design and control of xyθ fine stage using VCM for wafer stage-
dc.typeThesis(Master)-
dc.identifier.CNRN173877/325007-
dc.description.department한국과학기술원 : 기계공학전공, -
dc.identifier.uid020003061-
dc.contributor.localauthor김동민-
dc.contributor.localauthorKim, Dong-Min-
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ME-Theses_Master(석사논문)
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