DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 권대갑 | - |
dc.contributor.advisor | Gweon, Dae-Gab | - |
dc.contributor.author | 김동민 | - |
dc.contributor.author | Kim, Dong-Min | - |
dc.date.accessioned | 2011-12-14T06:38:19Z | - |
dc.date.available | 2011-12-14T06:38:19Z | - |
dc.date.issued | 2002 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=173877&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/45302 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 기계공학전공, 2002.2, [ vii, 76 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | 최적설계 | - |
dc.subject | 개념설계 | - |
dc.subject | 미세구동기 | - |
dc.subject | VCM | - |
dc.subject | 제어 | - |
dc.subject | control | - |
dc.subject | optimal design | - |
dc.subject | conceptual design | - |
dc.subject | fine stage | - |
dc.subject | VCM(Voice Coil Motor) | - |
dc.title | VCM을 이용한 wafer용 xyθ 미세구동기의 설계와 제어 | - |
dc.title.alternative | The design and control of xyθ fine stage using VCM for wafer stage | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 173877/325007 | - |
dc.description.department | 한국과학기술원 : 기계공학전공, | - |
dc.identifier.uid | 020003061 | - |
dc.contributor.localauthor | 김동민 | - |
dc.contributor.localauthor | Kim, Dong-Min | - |
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