헤테로다인 레이저 간섭계의 정밀 위상 측정Precision phase measurement for heterodyne laser interferometers

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Advisors
김승우researcherKim, Seung-Wooresearcher
Description
한국과학기술원 : 기계공학전공,
Publisher
한국과학기술원
Issue Date
2002
Identifier
173873/325007 / 000993822
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2002.2, [ iv, 34, xxxi p. ]

Keywords

레이저간섭계; 헤테로다인 레이저; 간섭계 위상 측정; 헤테로다인간섭계; precision phase measurement; phase meter; heterodyne laser interferometer; 위상측정기

URI
http://hdl.handle.net/10203/45298
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=173873&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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