효율적 정전기장 계산을 통한 MEMS구조물 해석에 대한 연구 = A study on the effective computational algorithm for electrostatic field for the analysis of MEMS structure

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Advisors
윤성기researcherYoun, Sung-Kieresearcher
Description
한국과학기술원 : 기계공학전공,
Publisher
한국과학기술원
Issue Date
2002
Identifier
173865/325007 / 020003288
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2002.2, [ viii, 76 p. ]

Keywords

기준전위; 다중극근사방법; 경계요소법; 정전기장; 초소형정밀기계시스템; MEMS; reference potential; Multipole expansion algorithm; BEM; Electrostatic field

URI
http://hdl.handle.net/10203/45290
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=173865&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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