학위논문(석사) - 한국과학기술원 : 기계공학전공, 2000.2, [ vi, 34 p. ]
기준측정평면; 표면 형상측정; 등가파장; 회절격자 간섭계; 등가파장보정; Equivalent wavelength calibration; Reference measurement plane; Surface flatness testing; Equivalent wavelength; Diffraction grating interferometer
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