학위논문(석사) - 한국과학기술원 : 기계공학과, 1998.2, [ viii, 68 p. ]
서브 나노미터의 정확도; 복합 간섭계; 고분해능; 레이저 간섭계; 기준점; Reference points; Subnanometric accuracy; Combined interferometry; High resolution; Laser interferometer
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