Browse "EE-Journal Papers(저널논문)" by Subject tuning of performance
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| A Proactive Plastic Deformation Method for Fine-Tuning of Metal-Based MEMS Devices After Fabrication Yoon, Yong Hoon; Han, Chang-Hoon; Lee, Jae Shin; Yoon, Jun-Bo, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.27, no.6, pp.1124 - 1134, 2018-12 |
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