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Electromagnetic transmission through multiple circular apertures in a thick conducting plane Park, YB; Eom, Hyo Joon, IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, v.52, pp.1049 - 1055, 2004-04 |
Electron beam damage in the SiN membrane of an X-ray lithography mask Choi, Sang-Soo; Kim, Jong Soo; Chung, Hai Bin; Yoo, Hyung Joun; Kim, Bo-Woo, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.37, no.1, pp.360 - 363, 1998-01 |
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