Browse "EE-Journal Papers(저널논문)" by Subject local oxidation of silicon (LOCOS)
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| Fabrication of Capacitive Micromachined Ultrasonic Transducers via Local Oxidation and Direct Wafer Bonding Park, Kwan Kyu; Lee, Hyunjoo; Kupnik, Mario; Khuri-Yakub, Butrus T., JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.20, no.1, pp.95 - 103, 2011-02 |
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