Browse "EE-Journal Papers(저널논문)" by Subject lithography defect
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| Lithography Defect Probability and Its Application to Physical Design Optimization Shim, Seongbo; Chung, Woohyun; Shin, Youngsoo, IEEE TRANSACTIONS ON VERY LARGE SCALE INTEGRATION (VLSI) SYSTEMS, v.25, no.1, pp.271 - 285, 2017-01 |
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