Browse "EE-Journal Papers(저널논문)" by Subject lithographic performance
Showing results 1 to 1 of 1
| Effect of degree of coherence in optical lithography using dummy diffraction mask Yim, D; Lee, S; Lee, S; Oh, YH; Chung, HB; Yoo, Hyung Joun, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.35, no.2A, pp.780 - 785, 1996-02 |
Discover
Open Access
- 573 OA Article
Date issued
- 1,837 2020 - 2024
- 5,085 2010 - 2019
- 4,213 2000 - 2009
- 2,379 1990 - 1999
- 665 1980 - 1989