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Preparation of high-quality undoped microcrystalline silicon with high deposition rate using mercury-sensitized photochemical vapor deposition method

Jang, JH; Lim, Koeng Su, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.35, no.11, pp.5625 - 5630, 1996-11

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