Showing results 1 to 3 of 3
Integrated Test Pattern Extraction and Generation for Accurate Lithography Modeling Cho, Gangmin; Kwon, Yonghwi; Kareem, Pervaiz; Shin, Youngsoo, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.35, no.3, pp.495 - 503, 2022-08 |
Optical Proximity Correction Using Bidirectional Recurrent Neural Network With Attention Mechanism Kwon, Yonghwi; Shin, Youngsoo, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.34, no.2, pp.168 - 176, 2021-05 |
Synthesis of Lithography Test Patterns Using Machine Learning Model Kareem, Pervaiz; Shin, Youngsoo, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.34, no.1, pp.49 - 57, 2021-02 |
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