Browse "EE-Journal Papers(저널논문)" by Author Yang, Ketong
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| Unlocking the Potential of Hafnia Ferroelectrics: Achieving High Reliability via Plasma Frequency Modulation in Very High-Frequency Plasma-Enhanced Atomic Layer Deposition Yang, Ketong; Jung, Minhyun; Jung, Taeseung; Yoon, Jae Seok; Hwang, Junghyeon; Shin, Hunbeom; Kim, Seungyeob; et al, ACS APPLIED ELECTRONIC MATERIALS, v.6, no.7, pp.5067 - 5076, 2024-06 |
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