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Film bulk acoustic resonator fabrication for radio frequency filter applications Park, SH; Seo, BC; Park, HD; Yoon, Giwan, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS REVIEW PAPERS, v.39, no.7A, pp.4115 - 4119, 2000-07 |
Two-step deposition process of piezoelectric ZnO film and its application for film bulk acoustic resonators Park, SH; Seo, BC; Yoon, Giwan; Park, HD, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.18, no.5, pp.2432 - 2436, 2000-09 |
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