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ANNEALING EFFECTS IN HYDROGENATED SILICON-NITRIDE FILMS DURING HIGH-ENERGY ION-BEAM IRRADIATION

Lee, Joong-Whan; Lee, Sang-Hwan; Yoo, Hyung Joun; Jhon, Mu-Shik; Ryoo, Ryong, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.142, no.9, pp.3210 - 3214, 1995-09

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