Browse "EE-Journal Papers(저널논문)" by Author Park, Chan-Hoon
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| Run-to-run overlay control of steppers in semiconductor manufacturing systems based on history data analysis and neural network modeling Park, Seong-Jin; Lee, Moon-Sang; Shin, Sung-Young; Cho, Kwang-Hyun; Lim, Jong-Tae; Cho, Bong-Su; Jei, Young-Ho; et al, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.18, no.4, pp.605 - 613, 2005-11 |
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