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LITHOGRAPHIC PERFORMANCE ENHANCEMENT USING DUMMY DIFFRACTION MASK

Yoo, Hyung Joun; OH, YH; PARK, BS; CHOI, SS; JEON, YJ; LEE, C; Park, Sin Chong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.32, no.12B, pp.5903 - 5908, 1993-12

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