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Showing results 1 to 4 of 4

1
Calibration of Compact Resist Model Through CNN Training

Kwon, Yonghwi; Shin, Youngsoo, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.36, no.2, pp.180 - 187, 2023-05

2
Integrated Test Pattern Extraction and Generation for Accurate Lithography Modeling

Cho, Gangmin; Kwon, Yonghwi; Kareem, Pervaiz; Shin, Youngsoo, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.35, no.3, pp.495 - 503, 2022-08

3
Layout Pattern Synthesis for Lithography Optimizations

Kareem, Pervaiz; Kwon, Yonghwi; Shin, Youngsoo, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.33, no.2, pp.283 - 290, 2020-05

4
Optical Proximity Correction Using Bidirectional Recurrent Neural Network With Attention Mechanism

Kwon, Yonghwi; Shin, Youngsoo, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.34, no.2, pp.168 - 176, 2021-05

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