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Two-axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors Jeong, Jae-Woong; Park, Bryan; Keum, Hohyun; Kim, Seok; Rogers, John A.; Solgaard, Olav, OPTICS EXPRESS, v.21, no.11, pp.13800 - 13809, 2013-06 |
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