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INVESTIGATION ON THE ELECTRICAL CONTACT BEHAVIORS OF RF MEMS SWITCHES USING NANO-INDENTER

Kim, Dong-Seok; Ko, Seung-Deok; Lee, Seung-Jun; Lee, Byung-Kee; Yoon, Jun-Bo; Kim, Do-Kyung, REVIEWS ON ADVANCED MATERIALS SCIENCE, v.28, no.1, pp.17 - 20, 2011-06

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