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Integrated Test Pattern Extraction and Generation for Accurate Lithography Modeling Cho, Gangmin; Kwon, Yonghwi; Kareem, Pervaiz; Shin, Youngsoo, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.35, no.3, pp.495 - 503, 2022-08 |
Layout Pattern Synthesis for Lithography Optimizations Kareem, Pervaiz; Kwon, Yonghwi; Shin, Youngsoo, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.33, no.2, pp.283 - 290, 2020-05 |
Synthesis of Lithography Test Patterns Using Machine Learning Model Kareem, Pervaiz; Shin, Youngsoo, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.34, no.1, pp.49 - 57, 2021-02 |
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