Browse "EE-Journal Papers(저널논문)" by Author Kang, S.W.
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| Dependence of oxygen redistribution on titanium film thickness during titanium silicide formation by rapid thermal annealing Kang, S.W.; Park, Sin Chong; Chun , Soung Soon, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.7, no.6, pp.3246 - 3250, 1989-11 |
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