Browse "EE-Journal Papers(저널논문)" by Author Chan, LH
Showing results 1 to 1 of 1
| Impact of nitrogen implantation into polysilicon followed by drive-in process on gate oxide integrity Cho, Byung Jin; Ko, LH; Nga, YA; Chan, LH, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.146, no.11, pp.4259 - 4262, 1999-11 |
Discover
Open Access
- 573 OA Article
Date issued
- 1,805 2020 - 2024
- 5,085 2010 - 2019
- 4,213 2000 - 2009
- 2,379 1990 - 1999
- 665 1980 - 1989