Showing results 1 to 3 of 3
Effects of thermal annealing Of W/SiO2 multilayer Bragg reflectors on resonance characteristics of film bulk acoustic resonator devices with cobalt electrodes Yim, Mun-Hyuk; Kim, Dong-Hyun; Chai, Dong-Kyu; Yoon, Gi-Wan, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.22, no.3, pp.465 - 471, 2004-05 |
Improved resonance characteristics by thermal annealing of W/SiO2 multi-layers in film bulk acoustic wave resonator devices Kim, Dong-Hyun; Yim, Mun-Hyuk; Chai, Dong-Kyu; Park, Jin-Seok; Yoon, Gi-Wan, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS , v.43, no.4A, pp.1545 - 1550, 2004-04 |
ZnO film deposition on Al film and effects of deposition temperature on ZnO film growth characteristics Yoon, Giwan; Yim, Munhyuk; Kim, Donghyun; Linh, Mai; Chai, Dong-Kyu, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.22, no.1, pp.129 - 134, 2004-01 |
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