Browse "EE-Journal Papers(저널논문)" by Author Bhat, M

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1
Boron profile narrowing in laser-processed silicon after rapid thermal anneal

Poon, CH; Tan, LS; Cho, Byung Jin; See, A; Bhat, M, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.151, no.1, pp.80 - 83, 2004-01

2
Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation

Poon, CH; Cho, Byung Jin; Lu, YF; Bhat, M; See, A, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.21, no.2, pp.706 - 709, 2003-02

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