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Faraday cage angled-etching of nanostructures in bulk dielectrics Latawiec, Pawel; Burek, Michael J.; Sohn, Young-Ik; Loncar, Marko, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.34, no.4, 2016-07 |
Freestanding nanostructures via reactive ion beam angled etching Atikian, Haig A.; Latawiec, Pawel; Burek, Michael J.; Sohn, Young-Ik; Meesala, Srujan; Gravel, Normand; Kouki, Ammar B.; et al, APL PHOTONICS, v.2, no.5, 2017-05 |
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