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ZnO film deposition on Al film and effects of deposition temperature on ZnO film growth characteristics

Yoon, Giwan; Yim, Munhyuk; Kim, Donghyun; Linh, Mai; Chai, Dong-Kyu, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.22, no.1, pp.129 - 134, 2004-01

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