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Ultralow-k Amorphous Boron Nitride Film for Copper Interconnect Capping Layer Kim, Kiryong; Kim, Hyeongjoon; Lee, Sun-Woo; Lee, Min Yung; Lee, Gyusoup; Park, Youngkeun; Kim, Heetae; et al, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.70, no.5, pp.2588 - 2593, 2023-05 |
Unveiling the Annealing-Dependent Mechanical Properties of Freestanding Indium Tin Oxide Thin Films Oh, Seung Jin; Kwon, Jeong Hyun; Lee, Sangmin; Choi, Kyung Cheol; Kim, Taek-Soo, ACS APPLIED MATERIALS & INTERFACES, v.13, no.14, pp.16650 - 16659, 2021-04 |
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