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Signal Power-Insensitive Analog MEMS Tunable Capacitor by Immobilizing the Movable Plates

Yang, Hyun-Ho; Han, Chang-Hoon; Choi, Seon-Jin; Choi, Dong-Hoon; Yoon, Jun-Bo, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.24, no.5, pp.1545 - 1556, 2015-10

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