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Improved SOI FinFETs Performance with Low-Temperature Deuterium Annealing Ku, Ja-Yun; Yu, Ji-Man; Wang, Dong-Hyun; Jung, Dae-Han; Han, Joon-Kyu; Choi, Yang-Kyu; Park, Jun-Young, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.70, no.7, pp.3958 - 3962, 2023-07 |
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