Manufacturing system is consisted of two subsystems in general; physical system and information system. The integration of these two subsystems is an important issue for computer integrated manufacturing. This thesis proposes a new modeling framework for manufacturing system which can be used to model the two subsystems uniformly. The framework extends an information system modeling framework, namely IMF, to physical system modeling. Since the framework allows to model information system and physical system, and also the control flow in the same manner, information and physical processes can be integrated naturally. By using the proposed framework, the manufacturing system can be modeled in a unified format which can contribute to the integration of heterogeneous processes in the computer integrated manufacturing systems.