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Extremely Scaled FinFETs and Ultra-Thin Body SOI CMOS Devices

Choi, Yang-Kyu; Chang, Leland; Ha, Daewon; Lee, Jeongsoo; Ranade, Pushkar; Xiong, Shiying; Bokor, Jeffrey; et al, 3rd Meeting of the Electrochemical Society, 2003-04

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